Selaus tekijän mukaan kokoelmassa 1. Kirjat ja opinnäytteet
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High-Temperature MBE Manipulator for SiC Substrate Preparation and GaN Growth
Lapila, Eero (06.09.2023)Chemo-mechanically polished silicon carbide (SiC) substrates, intended for gallium nitride (GaN) growth, often exhibit poor surface quality. Sublimation etching presents a potential solution to enhance the SiC surface ...suljettu