Oxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing

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dc.contributor.authorMarjukka Tuominen
dc.contributor.authorJaakko Mäkelä
dc.contributor.authorMuhammad Yasir
dc.contributor.authorJohnny Dahl
dc.contributor.authorSari Granroth
dc.contributor.authorJuha-Pekka Lehtiö
dc.contributor.authorRoberto Félix
dc.contributor.authorPekka Laukkanen
dc.contributor.authorMikhail Kuzmin
dc.contributor.authorMikko Laitinen
dc.contributor.authorMarko P.J. Punkkinen
dc.contributor.authorHannu-Pekka Hedman
dc.contributor.authorRisto Punkkinen
dc.contributor.authorVille Polojärvi
dc.contributor.authorJari Lyytikäinen
dc.contributor.authorAntti Tukiainen
dc.contributor.authorMircea Guina
dc.contributor.authorKalevi Kokko
dc.contributor.organizationfi=fysiikan ja tähtitieteen laitos|en=Department of Physics and Astronomy|
dc.contributor.organizationfi=materiaalitutkimuksen laboratorio|en=Materials Research Laboratory|
dc.contributor.organizationfi=sulautettu elektroniikka|en=Embedded Electronics|
dc.contributor.organization-code1.2.246.10.2458963.20.15561262450
dc.contributor.organization-code1.2.246.10.2458963.20.20754768032
dc.contributor.organization-code1.2.246.10.2458963.20.55477946762
dc.contributor.organization-code2606706
dc.contributor.organization-code2606802
dc.converis.publication-id37469235
dc.converis.urlhttps://research.utu.fi/converis/portal/Publication/37469235
dc.date.accessioned2022-10-28T13:29:30Z
dc.date.available2022-10-28T13:29:30Z
dc.format.pagerange44932
dc.format.pagerange44940
dc.identifier.eissn1944-8252
dc.identifier.jour-issn1944-8244
dc.identifier.olddbid182454
dc.identifier.oldhandle10024/165548
dc.identifier.urihttps://www.utupub.fi/handle/11111/57231
dc.identifier.urnURN:NBN:fi-fe2021042612620
dc.language.isoen
dc.okm.affiliatedauthorTuominen, Marjukka
dc.okm.affiliatedauthorMäkelä, Jaakko
dc.okm.affiliatedauthorYasir, Muhammad
dc.okm.affiliatedauthorDahl, Johnny
dc.okm.affiliatedauthorGranroth, Sari
dc.okm.affiliatedauthorLehtiö, Juha-Pekka
dc.okm.affiliatedauthorLaukkanen, Pekka
dc.okm.affiliatedauthorKuzmin, Mikhail
dc.okm.affiliatedauthorPunkkinen, Marko
dc.okm.affiliatedauthorHedman, Hannu-Pekka
dc.okm.affiliatedauthorPunkkinen, Risto
dc.okm.affiliatedauthorKokko, Kalevi
dc.okm.discipline114 Physical sciencesen_GB
dc.okm.discipline114 Fysiikkafi_FI
dc.okm.internationalcopublicationinternational co-publication
dc.okm.internationalityInternational publication
dc.okm.typeA1 ScientificArticle
dc.publisherAmerican Chemical Society
dc.publisher.countryUnited Statesen_GB
dc.publisher.countryYhdysvallat (USA)fi_FI
dc.publisher.country-codeUS
dc.relation.doi10.1021/acsami.8b17843
dc.relation.ispartofjournalACS Applied Materials and Interfaces
dc.relation.issue51
dc.relation.volume10
dc.source.identifierhttps://www.utupub.fi/handle/10024/165548
dc.titleOxidation-Induced Changes in the ALD-Al2O3/InAs(100) Interface and Control of the Changes for Device Processing
dc.year.issued2018

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